Multichannel Thickness Monitor M73
Thin flim thickness monitor, is an important component used in thin film coating industry, such as OLED, photovoltaics, semiconductor, etc. It is based on quartz crystals' piezoelectricity effects, which means when the quartz crystals is deposited with certain materials, its oscillation frequency will also change. By monitoring the frequency change with precise reading circuits, we could know the thin film thickness change as precise as 0.01nm resolution.
Multichannel thickness monitor M73 could detect the frequency change of quartz crystals as low as 1Hz, which make it possible to monitoring the thickness change of 0.01nm. By using M73, it is achieved to control the film coating rate lower than 0.1nm/s. Besides, M73 could be loaded with three detectors at the maximum, which can monitor the thickness change at three different places with three different materials at the same time.
No oscillator needed
M73 could be armed with our own quartz crystal thickness detectors (containing water cooling units), or other commerical detectors with the same mechanism and crystal size. All the detector are connected to M73 directly without any oscillator. All needed is just a SMA cable, connnecting M73 and detectors. The height of our detectors could be adjusted according to the actual needs.
Indepedent input and control on multichannels
All three channels are controlled indepedently and the results are also indepedent, and could be presented at the same time.
Precise measurement
All the materials with known density could be used with M73, and the acoustic impedance and the tooling factor are used for correction according to different materials and different positions the detectors are placed in the chamber.
QC lifetime monitoring
The QC's lifetime is being monitored all the time, to remind the users to change the QC in time, avoiding QC stop working during film deposition.
Touch screening control and chassis design
All the input and output are through a 7 inch touch screen. The chassis size is listed in the above figures. If needed, another 5 inch touch screen and a 2U chassis product is also available.
Model name explained
MAB: A, the screen size, could be 5 or 7; B, the channel amount, could be 1, 2, or 3. Eg. M73 represents a monitor with 7 inch screen and 3 channels.
