The M53 three-channel film thickness monitor is a 2U rack-mounted multi-channel device designed for online monitoring of thin film deposition thickness. It achieves a thickness detection accuracy of 0.01 nm and can measure the deposition thickness of any material by inputting material density, acoustic impedance, and Tooling value. The device utilizes the piezoelectric ceramic effect of a quartz crystal oscillator to precisely detect frequency changes up to 1 Hz.

Equipped with a 485 communication interface, it allows for sophisticated communication output of thickness information for advanced control applications. By default, it includes a built-in oscillator with a distance of up to 1.4 meters from the machine to the probe. Custom versions can be equipped with an external oscillator allowing a distance of up to 20 meters between the machine and the probe.

The default configuration features three channels, enabling simultaneous independent monitoring of deposition thickness on three channels. It can be expanded to accommodate up to 20 channels based on specific requirements.

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