Single Channel Thickness Monitor M51
The M51 single-channel film thickness monitor is a 2U rack-mounted device designed for online monitoring of thin film deposition thickness. It boasts a thickness detection accuracy of 0.01 nm and can detect the deposition thickness of any material by simply inputting material density, acoustic impedance, and Tooling value. It utilizes the piezoelectric ceramic effect of a quartz crystal oscillator to accurately detect frequency changes up to 1 Hz.
The device includes a 485 communication interface for outputting thickness information for in-depth and complex control applications. By default, it features a built-in oscillator with a distance of up to 1.4 meters from the machine to the probe. Custom versions can be equipped with an external oscillator allowing a distance of up to 20 meters between the machine and the probe.