The M400 vacuum deposition machine is a compact thermal evaporation coating system with a spacious chamber and a small footprint. It can accommodate coatings with a maximum diameter of 350mm. Standard configuration includes three thermal evaporation coating positions and four expandable CF35 interfaces for additional customization of deposition positions. The deposition current range extends up to 0-100A.

Upon startup, the vacuum pumping speed reaches 10-3 Pa within 10 minutes. The thickness detection accuracy is as fine as 0.01nm, and the deposition rate can be precisely controlled to below 0.1nm/s. The uniformity of film thickness is less than 3% across a 100x100mm area.